TeraSpectra® AFM Microscopy Metrology – Model TNS3DI Instrumentation

TeraSpectra® AFM Microscopy Metrology – Model TNS3DI Instrumentation

Applied Research Photonics (ARP) TeraSpectra AFM Spectrometer is a turn key spectrometer system, that allows time domain measurements to be conducted over a time span of sub-Pico seconds to a few tens of Pico-seconds with an equivalent frequency range of 0.1 to ~30 THz.

This wide range allows characterizing a number of molecular events important in semiconductor and nano-material research and inspection.


TeraSpectra AFM

Time resolution ~33 Femto-seconds
Time span Up to 100 Pico-seconds
Fourier Transform Frequency Range 0.1 up to ~35 terahertz
Technology Next generation EOdendrimer terahertz emitter
Source power >5 milliwatts, average
Sensitivity ~100 FemtoMol

Revolutionary 3D Nano-ScaleSub-Surface Testing Services

Measuring the world one nano-particle at a time.  Semiconductor & Nanomaterial Testing Services  provides terahertz nano-scanning material characterization and testing services that helps semiconductor and nanomaterial researchers and manufacturers, easily visualize and identify in 3-Dimensional images,surface, sub-layer defects and failures. ARP testing is non-contact, non-distructive and performed at ambient temperatures.

Current Inspection Technology have Limitations

Atomic Force Microscopy (AFM) is one of the go-to technologies for wafer inspection, but requires surface contact which can damage nanometer scale circuits. X-Ray inspection technology imparts high energies which can damage substrate lattice structure. IR inspection technologies at wavelengths of 1.5 microns and UV inspection at 256 nanometers, which are the current state of the art, but are limited to surface inspection only. Electron Microscopes are very expensive, require sample destruction and tedious sample preparation.

Fast Turnaround Testing

Once material samples are received test duration is typically between 1 and 3 days per sample. Test duration, as always, are subject to the test criteria and characterization requirements of our customers. ARP’s consultants provide a comprehensive test report and assist in interpretation of results